Thermal flow sensor with vibrating element and gas sensor comprising at least one such sensor
US9599495B2 · kind B2 · utility
5Cited by
0References
30Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 18, 2013 |
| Grant date | Mar 21, 2017 |
| Priority date | — |
| Expiry date | Nov 6, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N33/0027
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to a thermal flow sensor comprising:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.