Measuring device for measuring a measurement object and related method

US9599558B2 · kind B2 · utility

Assignee

• Carl Zeiss Industrielle Messtechnik GmbH · DE

Inventors

• Peter Westphal · Jena, DE
• Thomas Engel · Aalen, DE

Key dates

• Filing date: Aug 7, 2013
• Grant date: Mar 21, 2017
• Expiry date: Nov 15, 2034

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N21/21
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A measuring device and corresponding method for measuring a measurement object, comprising an illumination device for illuminating the measurement object with an illumination pattern, a pattern generation device with at least one pattern generating element for bringing about a positionally variant intensity distribution of the illumination pattern, and an optical sensor arrangement for detecting the illumination pattern reflected and/or scattered by the measurement object. The measuring device has an optics which is telecentric at least on the measurement object side and is arranged in a beam path from the illumination device to the measurement object. The optical sensor arrangement detects the illumination pattern through at least one part of the telecentric optics. The pattern generating device is designed in such a way that the illumination pattern has a positionally and/or spectrally variant vertex focal length distribution on the measurement object side.