Optical inspection system and method
US9599572B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 7, 2014 |
| Grant date | Mar 21, 2017 |
| Priority date | — |
| Expiry date | Jun 2, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/0697
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical inspection system including a first multiplicity of cameras operative to image a second multiplicity of regions on an object, a third multiplicity of illumination sources and at least one illumination manager operative to combine illumination from the third multiplicity of illumination sources and thereafter to direct illumination therefrom to the second multiplicity of regions, the at least one illumination manager including a beam distributor receiving a composite input beam of a multiplicity of non-mutually coherent, spatially concentrated laser pulses and directing a multiplicity of composite output beams of a plurality of the non-mutually coherent, spatially concentrated laser pulses to a corresponding plurality of spatially distinct locations corresponding to the second multiplicity of regions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.