Method for manufacturing support frame for pellicle, support frame for pellicle, and pellicle
US9599889B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 11, 2013 |
| Grant date | Mar 21, 2017 |
| Priority date | — |
| Expiry date | Sep 21, 2033 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC25D11/16
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Provided are a method of manufacturing a support frame for a pellicle, capable of forming a sufficiently blackened anodic oxide film through anodic oxidation treatment and providing a support frame for a pellicle industrially inexpensively with ease, a support frame for a pellicle obtained by the method, and a pellicle. Specifically, provided are a method of manufacturing a support frame for a pellicle to be used as a pellicle including an optical thin film, the method including: annealing an aluminum material formed of an Al—Zn—Mg based aluminum alloy; and subjecting the aluminum material to anodic oxidation treatment in an alkaline solution to form an anodic oxide film having a lightness index L* value of 40 or less, a support frame for a pellicle obtained by the method, and a pellicle including the support frame for a pellicle and an optical thin film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.