Patent · US Active

Method for producing a microsystem having a thin film made of lead zirconate titanate

US9601649B2 · kind B2 · utility

0Cited by

2References

16Claims

0Family size

Assignee

PYREOS LTD. · GB

Inventors

Carsten Giebeler · Edinburgh, GB
Matthias Schreiter · Birkenfeld, DE
Thorsten Steinkopff · Eglharting, DE
Wolfram Wersing · Tauberbischofsheim, DE

Key dates

Filing date	Dec 11, 2014
Grant date	Mar 21, 2017
Priority date	—
Expiry date	Feb 12, 2035

Classification

Technology area (CPC H)Electricity
CPC primaryH10N30/076
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A method for producing a micro system, said method comprising: providing a substrate (2) made of aluminum oxide; producing a thin film (6) on the substrate (2) by depositing lead zirconate titanate onto the substrate (2) with a thermal deposition method such that the lead zirconate titanate in the thin film (6) is self-polarized and is present predominantly in the rhombohedral phase; and cooling down the substrate (2) together with the thin film (6).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.