High resolution planar hall effect sensors having plural orientations and method of operating the same to measure plural magnetic field components

US9606195B2 · kind B2 · utility

Assignees

• Bar-Ilan University · IL
• B. G. NEVEG TECHNOLOGIES AND APPLICATIONS LTD. · IL

Inventors

• Lior Klein · Ramat Gan, IL
• Asaf Grosz · Rishon LeZion, IL
• Vladislav Mor · Holon, IL
• Eugene Paperno · Beer Sheva, IL
• Shai Amrusi · Netivot, IL
• Igor Faivinov · Ashkelon, IL
• Mordechai Schultz · Holon, IL
• Omer SINWANI · Rishon LeZion, IL

Key dates

• Filing date: Mar 3, 2014
• Grant date: Mar 28, 2017
• Expiry date: Mar 3, 2034

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R33/07
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The present invention discloses plural planar Hall-effect sensors each having a magnetic sensing region of an elongated shape, the magnetic sensing regions having plural orientations, wherein, for a ratio of long axis length to short axis length greater than a predetermined number, effective single magnetic domain behavior is exhibited in the sensing region, the sensing having shape-induced uniaxial magnetic anisotropy with the easy axis parallel to the long axis of the magnetic sensing region; further wherein the magnitude of the uniaxial magnetic anisotropy depends on the ratio of the thickness of the sensing region to the length of the short axis, and method of operating the same to measure plural magnetic field components.