Magnetic field probe, magnetic field measurement system and magnetic field measurement method
US9606198B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 9, 2014 |
| Grant date | Mar 28, 2017 |
| Priority date | — |
| Expiry date | Apr 28, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/315
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A magnetic field probe, a magnetic field measurement system, and a magnetic field measurement method are provided. The magnetic field probe includes a probe head. The probe head includes a first and second inner metal layer. The first inner metal layer includes a first sensing part and a first connecting part coupled thereto. The first sensing part is configured for detecting a magnetic field signal of a device under test to form a first magnetic field distribution signal. The second inner metal layer includes a second sensing part and a second connecting part coupled thereto. The second sensing part is configured for detecting the magnetic field signal of the device under test to form a second magnetic field distribution signal. A distance between the first sensing part and the device under test is smaller than that between the second sensing part and the device under test.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.