Laser metrology system and method
US9606235B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 16, 2014 |
| Grant date | Mar 28, 2017 |
| Priority date | — |
| Expiry date | Apr 22, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/45
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A laser metrology system may include a modulated measurement beam, a beam splitter for splitting the measurement beam into a local oscillator beam and a transmitted beam, an optical assembly for projecting the transmitted beam to a measured area on a surface of a target structure and for receiving a reflected beam from the measured area, a beam combiner for combining the reflected beam and the local oscillator beam into a detection beam, a detector for processing the detection beam, the detector including a micro-lens for projecting the detection beam, a photodetector for carrying out coherent detection of the detection beam and detector electronics in communication with the photodetector for generating informational data from the detection beam, and a range processor for computing dimensional data about the measured area from the informational data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.