Enhancing spatial resolution utilizing multibeam confocal scanning systems
US9606343B2 · kind B2 · utility
Inventors
Key dates
| Filing date | Jun 22, 2015 |
| Grant date | Mar 28, 2017 |
| Priority date | — |
| Expiry date | Oct 14, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/58
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for utilizing a multi-beam confocal scanning system to generate an image of a sample, the image having an improved resolution, is provided. An array of beams may be positioned at a first location on the sample. A first plurality of images may be captured, where each of the first plurality of images is associated with a beam of the array of beams at the first location. The array of beams may be adjusted by a specific distance to a second location on the sample, the specific distance being smaller than an optical resolution limit of the multi-beam confocal scanning system. A second plurality of images may be captured, where each of the second plurality of images is associated with a beam of the array of beams at the second location.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.