Monolithic EUV transparent membrane and support mesh and method of manufacturing same
US9606459B2 · kind B2 · utility
1Cited by
2References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 29, 2014 |
| Grant date | Mar 28, 2017 |
| Priority date | — |
| Expiry date | Jan 12, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/62
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An apparatus according to the present invention comprises a membrane layer and a supporting supportive mesh, wherein the membrane layer and the supportive mesh form a monolithic structure that absorbs less than ten percent of EUV (Extreme Ultraviolet) light passing through it in which the membrane layer is composed of a metal-ceramic composite.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.