Adjusting monitored region in tracking scan
US9607385B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 9, 2015 |
| Grant date | Mar 28, 2017 |
| Priority date | — |
| Expiry date | Sep 18, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/10081
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A method and device for adjusting a monitored region in a tracking scan, comprising: selecting a best match of a positioned image from tracked image(s) as a monitored layer image so as to reduce position deviation of the monitored layer image with respect to the positioned image in a direction perpendicular to a plane on which the positioned image is located; and adjusting a position of a second monitored region on the monitored layer image according to a position of a corresponding first monitored region selected from the positioned image so as to reduce position deviation of the second monitored region with respect to the first monitored region in a plane parallel to the plane on which the positioned image is located.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.