Patent · US Active

Optical computing device diagnostics and treatment

US9612361B2 · kind B2 · utility

4Cited by
0References
23Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 12, 2014
Grant dateApr 4, 2017
Priority date
Expiry dateDec 12, 2034

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01V8/02
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An example method includes performing validation testing on a tool using a plurality of reference fluids, the tool having a calibrated optical sensor installed therein that includes one or more optical elements. One or more tool sensor responses from the calibrated optical sensor may be obtained and pre-processed, and the one or more tool sensor responses may be compared with calibrated optical sensor responses derived from the calibrated optical sensor during calibration and thereby detecting one or more optical sensor anomalies. The one or more optical sensor anomalies may be evaluated through performance analysis with one or more candidate models, and an alternative candidate model may be selected to mitigate the one or more optical sensor anomalies. One or more remedial options may be pursued when the alternative candidate model fails to mitigate the one or more optical sensor anomalies.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.