Creating defect classifiers and nuisance filters
US9613411B2 · kind B2 · utility
7Cited by
8References
41Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 2, 2014 |
| Grant date | Apr 4, 2017 |
| Priority date | — |
| Expiry date | Jan 30, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06V2201/06
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
Methods and systems for setting up a classifier for defects detected on a wafer are provided. One method includes generating a template for a defect classifier for defects detected on a wafer and applying the template to a training data set. The training data set includes information for defects detected on the wafer or another wafer. The method also includes determining one or more parameters for the defect classifier based on results of the applying step.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.