Mechanical design of multiple zone plates precision alignment apparatus for hard X-ray focusing in twenty-nanometer scale
US9613729B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 20, 2014 |
| Grant date | Apr 4, 2017 |
| Priority date | — |
| Expiry date | Dec 16, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K1/06
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
An enhanced mechanical design of multiple zone plates precision alignment apparatus for hard x-ray focusing in a twenty-nanometer scale is provided. The precision alignment apparatus includes a zone plate alignment base frame; a plurality of zone plates; and a plurality of zone plate holders, each said zone plate holder for mounting and aligning a respective zone plate for hard x-ray focusing. At least one respective positioning stage drives and positions each respective zone plate holder. Each respective positioning stage is mounted on the zone plate alignment base frame. A respective linkage component connects each respective positioning stage and the respective zone plate holder. The zone plate alignment base frame, each zone plate holder and each linkage component is formed of a selected material for providing thermal expansion stability and positioning stability for the precision alignment apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.