Patent · US Active

Fractal structures for MEMS variable capacitors

US9614024B2 · kind B2 · utility

1Cited by

5References

20Claims

0Family size

Assignee

King Abdullah University of Science and Technology · SA

Inventors

Amro M. Elshurafa · Thuwal, SA
Ahmed Gomaa Ahmed Radwan · Thuwal, SA
Ahmed Emira · Mission Viejo, US
Khaled Nabil Salama · Thuwal, SA

Key dates

Filing date	Aug 21, 2012
Grant date	Apr 4, 2017
Priority date	—
Expiry date	Oct 20, 2033

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/43
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

In accordance with the present disclosure, one embodiment of a fractal variable capacitor comprises a capacitor body in a microelectromechanical system (MEMS) structure, wherein the capacitor body has an upper first metal plate with a fractal shape separated by a vertical distance from a lower first metal plate with a complementary fractal shape; and a substrate above which the capacitor body is suspended.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.