Coating packaged chamber parts for semiconductor plasma apparatus
US9617633B2 · kind B2 · utility
26Cited by
1References
12Claims
0Family size
Assignee
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Key dates
| Filing date | Oct 29, 2013 |
| Grant date | Apr 11, 2017 |
| Priority date | — |
| Expiry date | May 15, 2035 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24355
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An advanced coating for parts used in plasma processing chamber. The advanced coating is formed over an anodized surface that has not been sealed. After the coating is formed, the coated area is masked, and the remaining anodized surface is sealed. The porous and rough structure of the anodized but un-sealed aluminum enhances adhesion of the coating. However, to prevent particle generation, the exposed anodized surface is sealed after formation of the coating. The coating can be of yttria, formed by plasma enhanced atomic deposition techniques which results in a dense and smooth coating.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.