Method and equipment based on detecting the polarization property of a polarization maintaining fiber probe for measuring structures of a micro part

US9618331B2 · kind B2 · utility

Assignee

• HARBIN INSTITUTE OF TECHNOLOGY · CN

Inventors

• Jiwen Cui · Jingwei, CN
• Junying Li · Somerville, US
• Kunpeng Feng · Xing'an, CN
• Jiubin Tan · Jingwei, CN

Key dates

• Filing date: Dec 31, 2014
• Grant date: Apr 11, 2017
• Expiry date: Dec 31, 2034

Classification

• Technology area (CPC G): Physics
• CPC primary: G01B11/18
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method and equipment based on detecting the polarization property of a polarization maintaining fiber (PMF) probe for measuring structures of a micro part are provided. The provided method relates to how to accomplish measuring structures of a micro part by transforming two or three-dimensional contact displacements into polarization property changes of the PMF probe, and how to reconstruct the structure geometry of a micro part. The provided equipment can be used to bring the spherical tip of the PMF probe into contact with a micro part, to determine coordinates of contact points, and to reconstruct the structure geometry of a micro part. The provided method and equipment feature high sensitivity, low probing force, high inspecting aspect ratio and immunity to environment interference.