MEMS anti-phase vibratory gyroscope

US9618342B2 · kind B2 · utility

Assignee

• Chinese Academy of Sciences, Institute of Geology and Geophysics · CN

Inventors

• Lian Yu · Beijing, CN
• Chen Sun · Beijing, CN

Key dates

• Filing date: May 6, 2014
• Grant date: Apr 11, 2017
• Expiry date: Jun 11, 2035

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81C2203/0118
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A MEMS anti-phase vibratory gyroscope includes two measurement masses with a top cap and a bottom cap each coupled with a respective measurement mass. The measurement masses are oppositely coupled with each other in the vertical direction. Each measurement mass includes an outer frame, an inner frame located within the outer frame, and a mass located within the inner frame. The two measurement masses are coupled with each other through the outer frame. The inner frame is coupled with the outer frame by a plurality of first elastic beams. The mass is coupled with the inner frame by a plurality of second elastic beams. A comb coupling structure is provided along opposite sides of the outer frame and the inner frame. The two masses vibrate toward the opposite direction, and the comb coupling structure measures the angular velocity of rotation.