Patent · US Active

Sensor element

US9618406B2 · kind B2 · utility

3Cited by

17References

13Claims

0Family size

Assignee

Piezocryst Advanced Sensorics GmbH · AT

Inventors

Dietmar Kroeger · Graz, AT
Peter Schmid · Rain, DE
Ulrich Schmid · Wien, AT
Alexander Schricker · Graz, AT
Christof Zarfl · Graz, AT

Key dates

Filing date	Sep 1, 2015
Grant date	Apr 11, 2017
Priority date	—
Expiry date	Oct 5, 2035

Classification

Technology area (CPC G)Physics
CPC primaryG01L19/04
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A sensor element (1) includes a substrate (2) and a strain-sensitive element (3) which is preferably applied to the substrate by means of thin-film technology and is used for measuring the deformation of the substrate (2) when pressure is applied or a force is introduced, the strain-sensitive element (3) including XAlOyN1-y, wherein X is a metal with a high melting temperature in the range of greater than 1400° C. and 0<y<0.4 applies. A passivation layer (5) can be applied to the strain-sensitive element (3).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.