Gas discriminating semiconductor sensors
US9618491B1 · kind B1 · utility
2Cited by
5References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 27, 2015 |
| Grant date | Apr 11, 2017 |
| Priority date | — |
| Expiry date | Feb 27, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/404
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Sensing particular gases in a mixture uses precise modulated heating. Sensor relative responses are compared at different temperatures and compared with known relative responses to identify gases and concentrations. Heater current sensors provide feedback control and microprocessor inputs. A processor controls complex impedances and varied frequencies in the sensors. Sensor responses at varied complex impedances and at varied frequencies are compared with known responses at those impedances and frequencies to determine existence and concentration of particular gases. Heater and sensor buses are separate or combined.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.