Image sensor device
US9620544B2 · kind B2 · utility
2Cited by
5References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 7, 2015 |
| Grant date | Apr 11, 2017 |
| Priority date | — |
| Expiry date | Sep 7, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10H20/814
Abstract
An image sensor device includes a substrate having a pixel array region, isolation structures in the substrate separating pixel regions from one another in the pixel array region, a photo-sensing region in each of the pixel regions, and a reflective cavity structure in the substrate within each of the pixel region. The reflective cavity structure continuously extends from a bottom of the isolation structure to a deeper central portion of each of the pixel regions, thereby forming a dish-like profile. The reflective cavity structure has a reflective index smaller than that of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.