Pressure sensor and method for producing a pressure sensor

US9625336B2 · kind B2 · utility

Assignee

• EPCOS AG · DE

Inventors

• Peter Thiele · Stocken, DE
• Christian Wohlgemuth · Berlin, DE

Key dates

• Filing date: May 10, 2012
• Grant date: Apr 18, 2017
• Expiry date: Dec 14, 2032

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/49002
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A pressure sensor (1) is specified, comprising a housing (2), a membrane (3), which forms with the housing (2) a chamber (4) closed off toward the outside, and a filling opening (6) for filling the chamber (4) with a fluid medium (5). The filling opening (6) is closed by means of a soldering or welding closure (7, 8). Furthermore, a method for producing a pressure sensor (1) is specified, wherein a housing (2), which together with a membrane (3) forms a chamber (4), is provided, the chamber (4) is filled with a fluid medium (5) through a filling opening (6), and the filling opening (6) is subsequently closed by means of soldering or welding.