Method and apparatus for signal path equalization in a scanning acoustic microscope
US9625572B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 30, 2012 |
| Grant date | Apr 18, 2017 |
| Priority date | — |
| Expiry date | Feb 17, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01S15/8938
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning acoustic microscope includes a signal processor and one or more signal paths. In operation, each signal path couples an ultrasonic transducer to the signal processor that processes signals received from the signal paths to produce an ultrasonic scan image. Each signal path has a response characteristic that includes a response characteristic of the ultrasonic transducer. In order to compensate for variations between the signal paths or variations between different transducers in the same signal path, at least one of the signal paths includes a signal path equalizer. The equalizer may be responsive to a set of equalization coefficients. The coefficients are selected such that the response characteristic of the signal path including the equalizer more closely matches a reference characteristic response. The equalizer may operate on a transmitted or received signal or be used to generate an ultrasonic pulse.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.