Partially insulated cathode
US9627166B2 · kind B2 · utility
0Cited by
5References
20Claims
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Assignee
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Key dates
| Filing date | Aug 11, 2014 |
| Grant date | Apr 18, 2017 |
| Priority date | — |
| Expiry date | Aug 27, 2034 |
Classification
- Technology area (CPC —)General
Abstract
A partially-insulated cathode for exciting plasma in a plasma chamber is provided. The partially-insulated cathode includes a conductive structure enclosing a cavity having a cavity surface and an insulating material contiguously covering a portion of the cavity surface from the cavity opening up to an insulation height that is less than a cavity height. Cross-sections of the cavity in X-Y planes have at least one respective cavity-width. A cavity opening has a diameter less than a minimum cavity-width of the at least one cavity-width.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.