Electromechanical transducer element, method of producing the electromechanical transducer element, droplet discharge head, and droplet discharge apparatus
US9627606B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 27, 2016 |
| Grant date | Apr 18, 2017 |
| Priority date | — |
| Expiry date | May 27, 2036 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2202/03
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
An electromechanical transducer element includes a first electrode, an electromechanical transducer film, and a second electrode. The electromechanical transducer film is a {100} preferentially oriented polycrystalline film. A sum of an orientation degree ρ{111} of {111} plane and an orientation degree ρ{100} of {100} plane is in a range of not less than 0.0002 and not greater than 0.25. At least two diffraction peaks of a plurality of diffraction peaks separated in diffraction peaks derived from {200} plane or {400} plane obtained by the θ-2θ measurement of the electromechanical transducer film according to the X-ray diffraction method attribute to a tetragonal a-domain structure and a tetragonal c-domain structure, respectively. A value of Sc/(Sa+Sc) is not greater than 20%, where Sa represents an area of a diffraction peak attributing to the tetragonal a-domain structure and Sc represents an area of a diffraction peak attributing to the tetragonal c-domain structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.