Capacitive microelectronic and/or nanoelectronic device with increased compactness
US9631952B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 22, 2015 |
| Grant date | Apr 25, 2017 |
| Priority date | — |
| Expiry date | Oct 22, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0814
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device with a mobile element extending along a given plane comprising at least one first, one second and one third layers extending in planes parallel to the given plane, with the first layer forming a support, the second layer comprising all or a portion of the mobile element and means for suspending the mobile element with respect to the support and the third layer comprising all or a portion of the capacitive means of which the capacitance varies according to the relative position of the mobile element with respect to the support, said capacitive means comprising at least one mobile electrode integral with one of the faces of the mobile element parallel to the given plane, and at least one fixed electrode with respect to the support, with the fixed and mobile electrodes being arranged at least partially in the same plane parallel to the given plane and at least partially above and/or below the mobile element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.