Production of a volume object by lithography, having improved spatial resolution
US9632420B2 · kind B2 · utility
29Cited by
5References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 9, 2014 |
| Grant date | Apr 25, 2017 |
| Priority date | — |
| Expiry date | Jan 9, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24479
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention concerns a method for producing a volume object by lithography, comprising a projection of the projection image onto a plane to be illuminated of the layer of material, which involves:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.