Suppression of spurious modes of vibration for resonators and related apparatus and methods
US9634227B1 · kind B1 · utility
4Cited by
33References
20Claims
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Key dates
| Filing date | Mar 6, 2014 |
| Grant date | Apr 25, 2017 |
| Priority date | — |
| Expiry date | Nov 19, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/241
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Suppression of spurious modes of vibration for resonators and related apparatus and methods. A device may include a MEMS resonating structure, a substrate, and anchors between the MEMS resonating structure and the substrate. The MEMS resonating structure may have at least one main eigenmode of vibration and at least one spurious eigenmode of vibration. The anchors may be configured to suppress the response of the at least one spurious mode of vibration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.