Systems and methods for treating workpieces

US9636719B2 · kind B2 · utility

Assignee

• Dürr Ecoclean GmbH · DE

Inventor

• Michael Forster · Altenthann, DE

Key dates

• Filing date: Sep 17, 2015
• Grant date: May 2, 2017
• Expiry date: Sep 17, 2035

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B08B3/024
• WIPO field: Chemical engineering
• WIPO sector: Chemistry

Abstract

Example systems and methods for treating workpieces are disclosed. In some examples, the system includes a treatment station positioned in a process chamber for treating the workpiece with fluid. The example system includes a handling device positioned in the process chamber. The example handling device includes a base positioned in the process chamber, a supporting arm coupled to the base and pivotable relative to the base about a first pivot axis, a pivoting arm coupled to the supporting arm and pivotable relative to the supporting arm about a second pivot axis, and a receptacle coupled to the pivoting arm and including a workpiece holder capable of picking up the workpiece from a workpiece feeder positioned outside of the process chamber. The example handling device is capable of moving the workpiece through an opening of the process chamber and into a treatment position at the treatment station.