Method for determining a change in distance to a movable and reflective target by means of interferometer to determine if the movement of the reflective target is really executable
US9638519B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 28, 2013 |
| Grant date | May 2, 2017 |
| Priority date | — |
| Expiry date | Feb 28, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01S7/48
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Embodiments of the invention relate to a method for determining a change in distance to a moving and reflective target. Embodiments of the invention can be performed by means of interferometry and may include the generation of laser radiation, the emission of the measurement radiation to the target, and the detection of at least part of the measurement radiation reflected at the target. In some embodiments, a superposition of the reflected measurement radiation with the reference radiation is generated and detected, an interferometer output variable is derived on the basis of the detected superposition, and/or a time-resolved output variable curve is produced from the derived interferometer output variable. In some embodiments, the output variable curve is continually checked in that the output variable curve is continually read out in a time-resolved manner.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.