System, devices and methods for measuring differential and absolute pressure utilizing two MEMS sense elements
US9638559B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 10, 2016 |
| Grant date | May 2, 2017 |
| Priority date | — |
| Expiry date | Feb 10, 2036 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF02D2200/0406
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Featured are systems and methods for measuring differential and absolute pressure of a flowing fluid/gas in a fluid system. In such a method the fluid system is configured with first and second pressure taps that are spaced from each so the second pressure tap is downstream of the first pressure tap in a direction of flow. An absolute pressure sense element and a differential pressure sense element are provided, where the absolute pressure sense element is first fluidly coupled to one of the first or second pressure tap to measure an absolute pressure representative of the flowing fluid/gas. The differential pressure sense element is second fluidly coupled to each of the first and second pressure taps so as to measure a differential pressure of the flowing fluid/gas between the first and second pressure taps.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.