Capacitive pressure transducer for measuring the pressure of a medium adjacent to the measuring cell
US9638598B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 25, 2014 |
| Grant date | May 2, 2017 |
| Priority date | — |
| Expiry date | Mar 25, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/125
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to a capacitive pressure transducer for measuring the pressure of a medium adjacent to the pressure transducer, which has a resilient measuring diaphragm, of which the first side is at least partially in contact with the medium and of which the second side, which faces away from the medium, comprises a measuring electrode and, for measuring a temperature, a resistance element made of a material having a temperature dependent resistance. Furthermore, the pressure transducer has a base body, which is arranged to oppose the second side of the measuring diaphragm, with a counter electrode, which forms a measuring capacitance with the measuring electrode. According to the invention, the resistance element is formed as a resistive layer disposed between the second side of the measuring diaphragm and the measuring electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.