Devices and methods for gravimetric sensing in liquid environments

US9638616B2 · kind B2 · utility

Assignee

• The Trustees of the University of Pennsylvania · US

Inventors

• Chiara Zuniga · Boston, US
• Matteo Rinaldi · Boston, US
• Gianluca Piazza · Lodi, IT

Key dates

• Filing date: Nov 1, 2011
• Grant date: May 2, 2017
• Expiry date: Sep 3, 2034

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2291/0427
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Devices and methods for gravimetric sensing are disclosed. A gravimetric sensor includes a piezoelectric resonator and an encapsulating layer formed on the surface of the resonator. The encapsulating layer defines a channel within the encapsulating layer on the surface of the resonator. The sensor is fabricated by forming a piezoelectric resonator, forming a sacrificial layer on a surface of the piezoelectric resonator, forming an encapsulating layer over the sacrificial layer on the resonator, and etching the sacrificial layer to remove the sacrificial layer and form a channel on the surface of the resonator. The sensor is used by supplying the liquid to the channel of the gravimetric sensor, operating the piezoelectric resonator, detecting a change in a resonant frequency of the resonator, and determining a presence of the analyte in the liquid from the change in resonant frequency of the resonator.