Stacked zone plates for pitch frequency multiplication

US9640291B2 · kind B2 · utility

Assignee

• CARL ZEISS X-RAY MICROSCOPY, INC. · US

Inventors

• Michael Feser · Martinez, US
• Alan Francis Lyon · Berkeley, US

Key dates

• Filing date: Oct 31, 2013
• Grant date: May 2, 2017
• Expiry date: Oct 31, 2033

Classification

• Technology area (CPC G): Physics
• CPC primary: G21K2201/067
• WIPO field: Engines, pumps, turbines
• WIPO sector: Mechanical engineering

Abstract

A compound x-ray lens and method of fabricating these lenses are disclosed. These compound lenses use multiple zone plate stacking to achieve a pitch frequency increase for the resulting combined zone plate. The compound equivalent zone plate includes a first zone plate having an initial pitch frequency stacked onto a second zone plate to form an equivalent compound zone plate. The equivalent zone plate has a pitch frequency that is at least twice the initial pitch frequency. Also, in one example, the equivalent zone plate has a mark-to-space ratio of 1:1.