Process for plasma treatment employing ceramic-filled polymer composite parts
US9640381B2 · kind B2 · utility
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Key dates
| Filing date | Apr 10, 2012 |
| Grant date | May 2, 2017 |
| Priority date | — |
| Expiry date | Feb 6, 2033 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC08G2650/40
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
Internal components of plasma reactors are composed of a toleratable, ceramic filled plasma-useful polymer such as a high temperature engineering thermoplastic, preferably a polyamideimide or polybenzimidazole. The parts exhibit a low erosion rate upon exposure to plasma at low pressure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.