Feedback for buffer layer deposition
US9640705B2 · kind B2 · utility
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29References
18Claims
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Assignee
Inventors
Key dates
| Filing date | May 11, 2015 |
| Grant date | May 2, 2017 |
| Priority date | — |
| Expiry date | May 11, 2035 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Improved methods and apparatus for forming thin film layers of chalcogenide on a substrate web. According to the present teachings, a feedback control system may be employed to measure one or more properties of the web and/or the chalcogenide layer, and to adjust one or more parameters of the system or buffer layer deposition method in response to the measurement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.