Deposition apparatus, method of manufacturing organic light emitting display apparatus using the same, and organic light emitting display apparatus manufactured by using the method
US9640784B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 3, 2014 |
| Grant date | May 2, 2017 |
| Priority date | — |
| Expiry date | Sep 19, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/164
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A deposition apparatus includes a substrate combining unit configured to dispose a substrate on a moving unit including a surface, a first blocking member combining unit configured to raise a first blocking member, a first deposition unit including one or more deposition assemblies configured to deposit a material on the substrate, a first blocking member separation unit configured to separate the first blocking member downward from the moving unit, and a first conveyer unit configured to convey the moving unit in a first direction, where the one or more deposition assemblies are spaced apart from the substrate by a predetermined distance so that the material is deposited on the substrate in the first deposition unit while the moving unit is conveyed in the first direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.