MEMS driver
US9641103B2 · kind B2 · utility
1Cited by
3References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 30, 2014 |
| Grant date | May 2, 2017 |
| Priority date | — |
| Expiry date | Aug 22, 2035 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B7/008
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Systems and methods provide actuator control. Actuator control is provided via charge control as opposed to voltage control. A driver for driving an actuator can include a charge pump for injecting charge into one or more capacitive elements of the actuator. The driver can further include a capacitance detection aspect for detecting the capacitance of the capacitive elements of the actuator to determine positioning of the actuator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.