Patent · US Active

MEMS driver

US9641103B2 · kind B2 · utility

1Cited by
3References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 30, 2014
Grant dateMay 2, 2017
Priority date
Expiry dateAug 22, 2035

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB81B7/008
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

Systems and methods provide actuator control. Actuator control is provided via charge control as opposed to voltage control. A driver for driving an actuator can include a charge pump for injecting charge into one or more capacitive elements of the actuator. The driver can further include a capacitance detection aspect for detecting the capacitance of the capacitive elements of the actuator to determine positioning of the actuator.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.