Single crystal micromechanical resonator
US9641154B2 · kind B2 · utility
5Cited by
17References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 11, 2016 |
| Grant date | May 2, 2017 |
| Priority date | — |
| Expiry date | Nov 11, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/027
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A single crystal micromechanical resonator includes a suspended plate of lithium niobate or lithium tantalate. The suspended plate and a support structure are formed from a single crystal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.