Patent · US Active

Apparatus for coating substrates using the EB/PVD method

US9644259B2 · kind B2 · utility

1Cited by

7References

10Claims

0Family size

Assignee

ALD VACUUM TECHNOLOGIES GMBH · DE

Inventors

Juergen Hotz · Munster, DE
Pavel Seserko · Karlstein, DE
Joerg Wittich · Otzberg, DE
Helmut Eberhardt · Gelnhausen, DE
Manfred Kirschner · Stuttgart, DE
Wolfgang Rieth · Gelnhausen, DE

Key dates

Filing date	Apr 20, 2011
Grant date	May 9, 2017
Priority date	—
Expiry date	Nov 22, 2032

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/3132
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

An apparatus for coating substrates with a coating material is disclosed. The apparatus includes a frame, a crucible arrangement including a first crucible and a second crucible disposed offset from one another in a horizontal plane, where the crucible arrangement is disposed on the frame. At least one first shaft is associated with the first crucible and at least one second shaft is associated with the second crucible, where the at least one first and second shafts are disposed in the frame beneath the first and second crucibles, respectively. A first lifting device is associated with the at least one first shaft and a second lifting device is associated with the at least one second shaft, where the first and second lifting devices are disposed in the frame. The frame is linearly displaceable in the horizontal plane.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.