Resistive pressure sensor including piezo-resistive electrode
US9645028B2 · kind B2 · utility
6Cited by
5References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 5, 2014 |
| Grant date | May 9, 2017 |
| Priority date | — |
| Expiry date | Apr 18, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L2009/0069
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided is a pressure sensor including an elastic thin film including a first surface and a second surface that face each other, the elastic thin film including an elastomer material, a plurality of protruding deformable structures patterned on the first surface; a piezoresistive electrode formed along surfaces of the plurality of protruding deformable structures; and a counter electrode disposed to face the piezoresistive electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.