QCM sensor
US9645115B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 6, 2013 |
| Grant date | May 9, 2017 |
| Priority date | — |
| Expiry date | Apr 22, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/02818
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A QCM sensor for detecting a physical quantity of a sample includes a quartz crystal vibrator for measurement, a quartz crystal vibrator for reference, and a housing accommodating the quartz crystal vibrator for measurement and the quartz crystal vibrator for reference. The quartz crystal vibrator for measurement has a first electrode that is contacted by a measurement sample to be detected, and a first quartz substrate provided with a surface on which the first electrode is formed. The quartz crystal vibrator for reference has a second electrode that is contacted by a reference sample as a reference when detecting a physical quantity of the measurement sample, and a second quartz substrate provided with a surface on which the second electrode is formed. A confining portion connects to the housing to confine the reference sample in a state of contacting the second electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.