Line width error obtaining method, line width error obtaining apparatus, and inspection system
US9646374B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 24, 2016 |
| Grant date | May 9, 2017 |
| Priority date | — |
| Expiry date | Feb 24, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
Optical image data is acquired by irradiating a pattern with light emitted from a light source. A threshold value is specified by internally dividing a minimum value and a maximum value of a signal amount of reference image data by a division ratio. A position corresponding to a signal amount of a threshold value is determined as an edge of a pattern of the reference image data. A position of a signal amount equal to the threshold value is determined as an edge of the pattern of the optical image data. A line width error is obtained as a difference between a first line width of the optical image data and a second line width of the reference image data. A new threshold value is specified in the case of fluctuation of a light quantity of the light source or decrease of a contrast value of the optical image data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.