High speed X-ray microscope
US9646732B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 8, 2016 |
| Grant date | May 9, 2017 |
| Priority date | — |
| Expiry date | Aug 8, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K2207/005
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A high resolution x-ray microscope with a high flux x-ray source that allows high speed metrology or inspection of objects such as integrated circuits (ICs), printed circuit boards (PCBs), and other IC packaging technologies. The object to be investigated is illuminated by collimated, high-flux x-rays from a movable, extended source having a designated x-ray spectrum. The system also comprises a means to control the relative positions of the x-ray source and the object; a scintillator that absorbs x-rays and emits visible photons positioned in very close proximity to (or in contact with) the object; an optical imaging system that forms a highly magnified, high-resolution image of the photons emitted by the scintillator; and a detector such as a CCD array to convert the image to electronic signals.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.