Method for calibration of a CD-SEM characterisation technique

US9646804B2 · kind B2 · utility

Assignee

• COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

• Johann Foucher · Saint-Égrève, FR
• Jerome Hazart · Eybens, FR

Key dates

• Filing date: Aug 7, 2014
• Grant date: May 9, 2017
• Expiry date: Aug 7, 2034

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/2826
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A calibration method for a CD-SEM technique, includes determining a match function converting at least one parameter obtained by modelling a measurement supplied by the CD-SEM technique into a function of at least one parameter representative of a measurement supplied by a characterisation technique different from the CD-SEM technique, the match function being characterised by a plurality of coefficients; performing measurements on a plurality of patterns chosen to cover the desired validity range for the calibration, the measurements being done using both the CD-SEM technique to be calibrated and the reference technique; determining, from the measurements, a set of coefficients of the match function minimising the distance between the functions of the parameters measured using the reference technique and applying the match function to the parameters obtained by modelling measurements supplied by the CD-SEM; using the set of coefficients during the implementation of the calibrated CD-SEM technique.