Semiconductor memory device and method for manufacturing same
US9646988B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 4, 2015 |
| Grant date | May 9, 2017 |
| Priority date | — |
| Expiry date | Sep 4, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D84/038
Abstract
According to one embodiment, a semiconductor memory device includes a substrate; a stacked body provided on the substrate, the stacked body including a plurality of electrode layers and a first step portion, the first step portion having the plurality of electrode layers provided stepwise; a column provided in a region of the stacked body other than a region in the first step portion provided; and a plurality of insulating portions provided in the first step portion. The stacked body includes a metal silicide portion provided between the plurality of insulating portions and the plurality of electrode layers, a plurality of terraces provided on a top surface of each of the plurality of electrode layers of the first step portion, and a plurality of contact portions provided on the plurality of terraces.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.