Patent · US Active

Method for producing an electronic component and electronic component

US9647186B2 · kind B2 · utility

2Cited by

12References

15Claims

0Family size

Assignee

Osram OLED GMBH · DE

Inventors

Christian Schmid · San Diego, US
Tilman Schlenker · Nittendorf, DE
Heribert Zull · Regensburg, DE
Ralph Paetzold · Roth, DE
Markus Klein · Glückstadt, DE
Karsten Heuser · Erlangen, DE

Key dates

Filing date	Jan 24, 2014
Grant date	May 9, 2017
Priority date	—
Expiry date	Sep 4, 2034

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY02P70/50
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A method for producing an electronic component comprising barrier layers for the encapsulation of the component comprises, in particular, the following steps: providing a substrate with at least one functional layer, applying at least one first barrier layer on the functional layer via plasma enhanced atomic layer deposition (PEALD), and applying at least one second barrier layer on the functional layer by means of plasma-enhanced chemical vapor deposition (PECVD), where the at least one first barrier layer is applied at a temperature of less than 100° C.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.