Sheet-shaped mold position detection device, transfer device and transfer method
US9649787B2 · kind B2 · utility
3Cited by
1References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 24, 2011 |
| Grant date | May 16, 2017 |
| Priority date | — |
| Expiry date | Jan 13, 2033 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB29C2059/023
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
A sheet-shaped mold position detection device 183 for conveying and positioning a sheet-shaped mold M on which a fine transfer pattern M1 is formed. The sheet-shaped mold position dejection device 183 includes a sheet-shaped mold position detector 191 that detects a predetermined region of the sheet-shaped mold M by detecting transmittance of light in the sheet-shaped mold M.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.