Vibration device including support portion
US9650238B2 · kind B2 · utility
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16Claims
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Assignee
Inventors
Key dates
| Filing date | Sep 2, 2014 |
| Grant date | May 16, 2017 |
| Priority date | — |
| Expiry date | Sep 16, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02N11/002
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A vibration device including a supporting portion formed to cover both ends of a vibration region, and a method of manufacturing the vibration device are provided. The vibration device may include a lower substrate on which an insulating layer is formed, an upper substrate connected onto the insulating layer, and including a vibration region that vibrates and that is separated from the lower substrate by at least a predetermined distance, and a supporting portion formed to cover both ends of the vibration region, to support the vibration region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.