Method and device for laser-optical detection of a surface movement of a sample using reference beams respectively superimposed on measurement beams in photorefractive/electro-optical elements
US9651364B2 · kind B2 · utility
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Inventor
Key dates
| Filing date | Oct 30, 2013 |
| Grant date | May 16, 2017 |
| Priority date | — |
| Expiry date | Jan 21, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/45
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for laser-optical detection of a surface movement of a sample (1) is specified, whereby a first laser reference beam (10) is superimposed with a first laser measurement beam (12) directed onto the sample (1) and reflected by the latter in a first photorefractive/electro-optical element (4). In addition, a second reference beam (11) identical to the first reference beam (10) is superimposed with a second measurement beam (13) identical to the first measurement beam (12) in a second photorefractive/electro-optical element (5). Mutually inverse voltages are applied to the two photorefractive/electro-optical elements (4, 5). The light emerging from the photorefractive/electro-optical elements (4, 5) is converted into electric signals which are subtracted from one another prior to the signal evaluation. Also specified is an arrangement for implementing said method.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.